Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors
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چکیده
منابع مشابه
An Investigation into Resonant Frequency of Triangular V-Shaped Cantilever Piezoelectric Vibration Energy Harvester
Power supply is a bottle-neck problem of wireless micro-sensors, especially where the replacement of batteries is impossible or inconvenient. Now piezoelectric material is being used to harvest vibration energy for self-powered sensors. However, the geometry of a piezoelectric cantilever beam will greatly affect its vibration energy harvesting ability. This paper deduces a remarkably precise an...
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